20th International CODATA Conference (Times New Roman, 11pt)
Session: Computational informatics: integrating data science with materials modeling

Semiconductor silicon for microelectronics, power electronics and photovoltaics. Russian Scenario

F.A. Kuznetsov

Institute of inorganic chemistry, Siberian branch of Russian Academy of Sciences, Novosibirsk, Russia

Semiconductor silicon is a good example of high tech material, which requires continuous attention of researchers. Silicon is among possibly most studied of all know materials. However, is clear that potential combinations of properties of this material are far from being exhausted. Permanent perfection of this material is reflected in progress of solid state electronics, where silicon is and for a long time will be main material.

Most sophisticate part of technology of semiconductor silicon is technology of polycrystalline silicon. Till now most widely used process for producing of the poly silicon was so called Siemens process. Actually each producer is using his own variety of this “chlorine” process. Differences are connected with technology routes of different components of the process, regimes of various stages of the process, ways of using byproducts and so on. Essential in selection of technology version is planned application of the silicon. Requirements for different uses differ significantly.

Institute of Inorganic Chemistry SB RAS for a long time is involved in investigation of processes, which are part of technology of semiconductor silicon. There are number of place in Russia, where big scale production of semiconductor silicon is under construction.

. The paper includes description of developed methods of thermodynamic analysis and its application for optimization of processes of poly silicon production by a variety of Siemens process. Information of practical use of results of the thermodynamic analysis by our industrial partners will be also given.

In conclusion other methods of poly silicon production will be considered.